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MOE Key Laboratory of Thin Film and Microfabrication Technology

Brief Introduction

Thin Film and Microfabrication Technology Laboratory of Ministry of Education was established in August 1993, and was officially opened in December 1993. In 2000, the laboratory achieved the certification and authorization as the Ministry of Education Key Laboratory.

Its mission is to work on the basic and applied research of cutting edge micro& nano science and technology, by engaging in thin film electronic materials and thin film sensors, microfabrication technology, microelectromechanical systems, nano-electronics, nano-materials and technology, and other multidisciplines. In recent years, the laboratory has undertaken a series of major research projects including 973 projects, 863 projects, the National Natural Science Foundation, the National "Ninth Five-Year" key project, the National "Tenth Five-Year" key project, and the project of People's Liberation Army General Armament Department, key project of Ministry of Education, key project of Science and Technology Commission of Shanghai. Various science and technology awards have been granted for its research achievements, among which there are two second prizes for the "National Technology Invention" and 14 pieces of award of various provincial ministries.

Thin Film & Microfabrication Lab



Professor Zhang Yafei(Professor of the Yangtze Fund Scholar)

2.Director of Academic Committee

Professor Zhuang Songlin (Academician)

3.Team Members

Cui Daxiang(Professor), Ding Guifu(Professor), Zhao Xiaolin(Professor), Guo Shouwu(Professor), Yang Chunsheng(Professor), Chen Wenyuan(Professor), Wang Qingkang(Professor), Chen Jiapin(Professor), Chen Di(Professor), Yang Tian(Professor), Zhu Xinen(Professor), Su Yikai(Professor), Li Ming(Professor), Jiang Chuanhai(Professor), Wang Hui(Professor), Liang Qi(Professor), Ren Tianhui(Professor), Shen Tianhui(Academician), Xie Hanping(Professor), Che Shunai(Professor), Kong Xiangyang(Professor), Hu Weisheng(Professor), Liu Qinghua(Professor), Liu Jingquan(Professor), Xu Dong(Professor), Zhou Yong(Professor), Li Yigui(Professor), Zhang Weiping(Professor), Feng Jie(Professor)

Research Fields

a) Non-Silicon Micro Fabrication and MEMS

b) Nano Fabrication and Device

c) Nano Bio and Medical Technology

Research Achievements

1. Technology and Application of Non-silicon MEMS

Non-silicon MEMS, based on non-silicon materials, is a multi-disciplinary high technology which integrates micro-structure, micro-sensor, micro-actuator and micro-electronic control. Supported by "863 Program" and through its independent innovation, Shanghai Jiao Tong university has made a series achievements in the field of non-silicon MEMS fabrication technology, non-silicon device and non-silicon electromagnetic MEMS technology, which include invention of 3-D non-silicon MEMS fabrication technology, invention of innovative actuator such as stepping electromagnetic micro-motor and Reciprocating micro-motor, invention of micro-fluidic PCR biochip and capillary electrophoresis chip based on polymer materials, invention of non-silicon electromagnetic low-light-level device such as MEMS optical switch and invention of innovative electromagnetic micro-system such as MEMS strong-link.

We have applied for 71 national invention patents, 40 of which have been authorized. We have also been authorized the copyright of two softwares and published five works on MEMS and 111 articles in the journal both home and abroad. With the achievements of the second prize of National Technological Innovation in 2008 and the first prize of Shanghai Technological Innovation in 2007, the item has reached the international advanced level and lead position in domestic level.

The achievements in non-silicon MEMS technology has been made into use in dozens of companies and institutions, including Fudan university, Shanghai Institute of Optics and Fine Mechanics owned by Chinese Academy of Science, 304 state-owned factory, Jiangsu Shangshang Cable Group, etc. Owing to its significant economic, social and national security benefits, the technology has been widely seen in the research and application in the field such as biochip, micro-fuse, information MEMS optical device, composite film mold and integrated probe card.

Thin Film & Microfabrication Lab

Thin Film & Microfabrication Lab

2.Suboxide assisted synthesis of 1D semiconductor nanomaterials and applications

The unique properties of semi-conducting nanowires and their potential applications as nano devices have attracted world-wide interests in recent years.   We have developed unique approaches in nanomaterial synthesis and characterization. In addition, we have successfully developed nanodevices including nano-sensors. Specifically, the achievements are: introducing the oxide-assisted growth (OAG) technique to explain the nucleation and growth mechanism of nanowires, and systematically studying the effect of structures and properties of nanowires under different growth conditions, such as, ambient gases sources, pressures and temperatures. By using the OAG technique, we can now produce nanowires in high quality, large quantity, with preferential growth direction, uniformed size, long length, and increased performance. In addition to the growth of Si nanowires, the techniques can also be used to produce high quality germanium nanowire (GeNWs), CNT, silicon carbide (SiC) nanowires and nanorods, as well as III-V group semiconductors nanowires. Using the materials we synthesized, we have conducted in-depth studies on the nano structures, surface properties, optics properties, and field emission of these nanowires. We have also successfully separated the nanowires and manipulated them in nano devices such as nanosensors.

Thin Film & Microfabrication Lab

3. Biological nanotechnology and applications

Biological nanotechnology is a crossing field between life science and nanomaterials on the base of advanced functional nanomaterials. The research scope is focused on the molecule, cell, animals, humans, ambient research physical/chemical characteristics and biological effects of nanomaterials. The research aim is to resolve the aggregation, transmembrane, across blood-brain barrier, biology compatibility et al.

Under the support of 973, 863 and national key project, major advances have been achieved in the areas such as the fabrication of advanced nanomaterials, diagnosis and therapy for malignant tumors, ferrofulid and biochip. The main research scope is: Controllable synthetic technology in the aspects of advanced functional materials; Quick bio-detect technology of pathogenic micro-organism based on the functional nanoparticles label and effect; Gastric cancer gene and antibody probers are achieved based on the quantum dots, fluorescence magnetic nanoparticles and gold nanorods. The research work may contribute to the alarm symptoms of gastric cancer and molecular imaging building blocking.

We have applied for 35 invention patents, ten of which have been authorized, one of which is European patent. We have applied one software copyright and developed 5 national files concerning the diagnostic reagent and equipments. We have published one academic work and over 140 important articles in the national and international journal. The project has been expected to reach the international advanced level and the dominated position on domestic level.

The achievements in biological nanotechnology have been widely used by many institutions, such as Shanghai Jiao Tong University, Southeast University, The Fourth Military Medical University, Academy of Military Medical Sciences and Shanghai Ninth People's Hospital. Significantly economic and social benefits have been expected in the exploration and application of advanced functional nanomaterials, quantum dots, fluorescence magnetic nanoparticles for the alarm symptoms of gastric cancer and molecular imaging building blocking.

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Thin Film & Microfabrication Lab


1. Chalcogenide based phase change memory technology

Key laboratory for thin film and micro-fabrication technology of Ministry of Education, Shanghai Jiao Tong University collaborated with Silicon Storage Technology Inc. (USA) to perform the Joint research project on chalcogenide based phase change memory technology. Starting with improving the characteristics of phase change materials, we studied the Si-doped and N-doped GeSbTe materials. We have developed the new Si-Sb-Te phase change materials. Comparing with traditional GeSbTe materials, the Si-Sb-Te materials show better data retention at high temperature. Lower RESET current and power can be obtained for the memory device based on the Si-Sb-Te films. We have developed phase change memory device with stacked film structure. The multilevel storage with two bits in one cell can be realized with this stacked film structure, and the memory density increase. From the research results, four PRC patents have been issued and one PRC patent-applications is in pending. 17 refereed journal papers have been published including 14 SCI cited papers.

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2. Nanostructured wrinkle-resistant cotton fabric finishing agent with shape memory effect

Key laboratory for thin film and micro-fabrication technology of Ministry of Education, Shanghai Jiao Tong University collaborated with TaL Inc. (HongKong) to perform the nanostructured wrinkle-resistant cotton fabric finishing agent with shape memory effect. A series of nano-cross-linked waterborne shape memory polyurethaneurea ionomers modified with fluorinated silicones were synthesized, whose transition temperature can be tuned in the vicinity of body temperature. Based on this polyurethaneurea aqueous dispersion, we further developed a novel shape memory finishing nano-agent without releasing any formaldehyde, and finally obtained wrinkle-resistant cotton fabric showing shape memory properties.

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3. New magnetic sensor

Key laboratory for thin film and micro-fabrication technology of Ministry of Education, Shanghai Jiao Tong University collaborated with HoneyWell Inc. (USA) to perform the new magnetic sensor. Soft magnetic thin films such as NiFe, CoZrNb were sputtered or electroplated onto glass substrate, the fabrication conditions were investigated systematically in detail, and the optimum preparation conditions, magnetic properties and the giant magneto-impedance (GMI) effect were obtained. An analytic model of GMI effect correlated to the structure parameters and the materials' parameters was established based on the electromagnetic theory and micro-magnetics, which could predict the performance of the GMI sensor. The prototype GMI sensor with different structure parameters and shapes was fabricated by MEMS technology, with a field sensitivity of 35% for the sensor.

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